Theoretical Research And Finite Element Analysis On The Static And Dynamic Response Of Micro-and Nanosensors Caused By Effects Of Adsorption And Temperature

The past decade has witnessed the development of micro-and nanoscalefunctional devices designed for nanoscale sensing and detection. Because micro-andnanoresonators are characterized by a large surface-to-volume ratio, surface effectsplay a critical role on their mechanical characteristics. Specifically, for a micro-andnanocantilever, hasing a film/substrate structure, flexural deflection and resonancefrequency shift can also caused by changes of temperature, which would affect theaccuracy in sensing and dection.In the work, first, we present a theoretical framework to investigate the flexuraldeflection and resonance frequencies due to atom/molecule adsorption in presence ofsurface effects and thermalmechanical effects caused by change of temperature.Surface effects addressed here is the surface stress caused by Van der Waalsinteraction between atoms/molecules which is depicted by Lennard-Jones potential,when phsisorption interaction happens on micro-or nanocantilever surface; thermaleffects include a thermal mismatch between the substrate and film owing to differentthermal expansion coefficients and a change of material properties with a change ofambient temperature. Then static deflecton and dynamic response of cantilevers dueto atom/molecule adsorption with the simutaneous effects of surface elasticity andthermalmechanical effects are numerically analyzed.Next, in light of the pratical apllied macro-and nanoresonators, by using finiteelement software to simulate and calculate their static and dynamic response, weexamine and certify our theoretical framework. Through simulating and calculatingthe phenomenon of rolled-up nanofilms and nanocantilever resonance frequencycaused by adsorption and temperature by means of finite element software, we findthat the flexural curve and resonance frequency shift calculated by finite elementaccord with our theoretical results very well.Our work would provide theoretical basis and positive guidelines for the analysisof the sensitivities, and the identifcation of the detected substance in the design andapplication of micro-and nanocantilever sensors.