The Influence Of Grinding Wheel Dicing Saw Machine's Principal Components On Its Precision

Today's world is a highly-developed information age.Semiconductor is widely employed in the field of computer,communication,aeronautics and astronautics,biotechnology,electronics,even household appliances and other aspects in today's society by virtue of its unique and indispensable advantages.The project originates from Institution of Shenyang Instrument.And a 3-D model is designed depending on the prototype(ZSH506)of dicing saw machine which was provided by the institution.The purpose of setting up 3-D model is beneficial to the acquaintance of the structure and later analysis.Firstly,the paper finds out the principal factors that have a great influence on the precision of the dicing saw machine depending on the review of literature,interview of workers and failure history of the machine.Then,the abrasion of linear-motion guide and air bearing spindle are selected as the target factors.As for the abrasion of linear-motion guide,the paper deduces the equations for its abrasion.And matrix are employed to help calculate the rub error of the center of the target silicon component based on Archard theory.The air bearing spindle are also investigated in order to improve the precision of the machine.Bolt screw thread and gap between the bolt and the fixture are taken into consideration in the FEA model.A research on the relationships between bolt pretension and the precision of the air bearing spindle is mainly conducted,and obtain some curves concerning the relationship relying on the FEA model.In addition,such load like bolt pretension and cutting force are exerted on the model.The non-convergence of gap produced by the bolt and the fixture are solved by virtue of soft material.Furthermore,the paper comes up with two suggestions based on the previous research.And a simple vehicle is designed to fix the adjusted air bearing spindle after setup and maintain the expected precision of the machine.The project has finished the analysis of the rub of linear-motion guide and air bearing spindle.Two suggestions are put forward to improve the precision of the machine,which has laid a solid foundation for the improvement of the dicing saw machine and other similar machine.