Design And Preparation Of Flexible Temperature And Pressure Integrated Sensor

Flexible sensor is compared with the traditional sensor with can form degeneration,high ductility and the advantages of the strong biological compatibility,along with the development of flexible electronics technology,flexible sensor in the electronic skin,temperature monitoring,and the application of pressure sensor,etc,have a certain degree of recognition and widely used in the field of daily life and scientific research needs.Based on the existing research progress in this field,a flexible integrated temperature and pressure sensor is designed in this paper,which uses the metal platinum film serpentine temperature sensor as the temperature sensor and the dielectric layer as the flat capacitor of porous PDMS film as the pressure sensor.Specifically,the main research contents of this paper include the following two aspects:1.Optimum fabrication technology of flexible temperature and pressure integrated sensor: using COMSOL Multiphysics simulation verify the design concept of this project,using MEMS technology of preparation of the whole plate area of 10 mm * 10 mm,center of serpentine area covers an area of 2 mm * 1.2 mm coil win min electrodes,and studied the characteristics of different preparation technology parameters,get the best snake win min electrode preparation technology as the electrode line width 50 um,20 min magnetron sputtering time,annealing temperature is 180 ?.Using ammonium bicarbonate as pore-forming agent,combined with die hot pressing method to prepare porous PDMS film,finally obtained the best preparation process of porous PDMS film:hydrogen carbonate doping concentration of 15wt%,film thickness of 1.5mm.2.Performance test of flexible temperature and pressure integrated sensor: The temperature response test results of flexible temperature and pressure integrated sensor in the range of 20??80? are as follows: linearity 0.21%,sensitivity 0.00226?-1,maximum stability fluctuation 0.13%,repeatability 0.25%,hysteresis 1.56%,resolution up to 0.2?,temperature response time 189 ms,strong bending resistance.Within 0 ? 300 k Pa pressure sensor the stress response of the test result is: the linearity of 0.47% and1.75%,the sensitivity of 0.0493 and 0.0041 k Pa k Pa-1-1,the output value in the process of circulation of the maximum rate of 0.56%,0.78%,repetitive sluggish 1.15%,can distinguish the pressure of 0.5 k Pa,response time,about 200 ms after bending device on the same test point of maximum capacitance change rate of 2.22%.The cross response of temperature and pressure of the sensor sample is tested.Because of the metal strain effect,the pressure will have some error influence on the temperature detection,while the temperature will not have obvious influence on the pressure detection.The application of the flexible integrated temperature and pressure sensor in the real scene shows its excellent device performance,which can effectively sense the external temperature and pressure changes.