The High Temperature Low Atmospheric Pressure Dynamic Pressure Test Method Research And Realizes

In this paper, a new type of high-temperature pressure sensors and circuit have been studied, the silicon mems pressure sensor is the core of the pressure sensor,increase in its external special insulation materials and heat-absorbing material,the pressure sensors was made through the use of technology such as a sealed,this pressure sensor over come the common short comings of the sensor is not temperature,and high temperature pressure sensors made of the shortcomings of high prices, technology simple,short production cycle, high temperature, particularly suitable for the use of the special environment, the main contents of this article, including:1 introduce the design ideas of high-temperature pressure sensor, description the theory Based on and principle and calculation。2 analysis the calculation of thermal ,introduce the theory of calculation is based on and the selection of relevant parameters, through thermal simulation and experimental validation of the theory,,found the most appropriate idea。3 in the basis of theoretical analysis, fully introduced the static and dynamic sensor calibration of the experimental method and experimental results。4 accordance with the actual working environment with the sensor,the sensor were sealed and vibration tested, ensure the sensors can work in practice the normal work environment5 complete presentation of the sensor circuit,the signal condition, acquisition circuits and related software have been introduced,given the collected results。Finally, the full summarized of the text,make the prospect of high temperature pressure sensors。...