Vacuum Microelectronic Pressure Sensor Array And Thin Film Platinum Resistance Temperature Sensor Integrated System

Vacuum Microelectronic pressure sensor is a noveI pressure sensor, whichpossesses extraordinny properties in high sensitivity teInperature stability, radiationhardness and IC compatibility.In this thesis, the author has developed a VME pressure sensor array that canmeasure the pressure distribution and integrated it with a Pt-thin-film resistortemperature sensor.The VME Pressure sensor arrny consists of 4x4 sensing cells, and the distancebetween the centers of two adjacent cells is lnun. The cathode of each cell is a"cathode-on-membrane" type thethe. The anode is based on a siIicon wafer onwhich every cell is insulated from each other by siO₂-Si₃N₄. film. The author hasdesigned the sensof, finished the fabrication and tested the characteristics.Meanwile, some research work on the "cathode-on-membrane" structure has beencarried on .The temperature sensor is a Pt-thin-film resistor tempefatffe sensor. The authorhas fabricated the sensor and integrated it with the VME pressure sensor array.Characteristics of the sensor have also been tested.