Design Of OXC Module And Test System Based On MEMS Optical Switch Array

With the rapid growth of broadband services,the scale of data center is expanding,and the amount of data and new applications are growing rapidly.It has become a trend to complete the data exchange of signals directly in the optical layer,while the traditional switching equipment can no longer meet the needs of the rapid development of all-optical network.In this case,the importance of the core optical cross connect(OXC)in all-optical switching technology is increasingly apparent,and the optical switch array is the key device in OXC.This thesis focuses on the design of optical switch array based on MEMS in OXC.The main contents of this thesis include the following aspects:1.This thesis introduces the overall optical path design of 1×N MEMS optical switch,introduces the calculation method and design idea of MEMS chip deflection angle,and analyzes the coupling theory and efficiency of reflected beam.and summarizes the control principle of MEMS chip micro mirror,and finally analyzes the interference problem in the switching process of MEMS optical switch and the automatic selection method of non-interference points in this design.2.In this thesis,the fabrication process and process of the spliced optical switch array are studied,and the alignment method of the collimating optical system is introduced.Then,the overall framework of the hardware drive circuit and the functional modules are designed.Finally,a new test system is designed,including building a test platform,designing a test scheme,giving the test results of conventional optical indicators,and analyzing the improvement scheme.3.The thesis details the optical path design and the test system design of the OXC module based on the N×N MEMS optical switch array.The channel coordinate calculation formula of three-dimensional MEMS optical switch array is derived.The relationship between the output channel and input channel,as well as the micro mirror rotation angle of chip array A and chip array B is studied.Then,the test system is built to obtain the relation curve between the angle of MEMS micro mirror and the applied voltage Finally,the calibration system of MEMS chip array is designed and analyzed,and the detailed calibration process is designed.The innovations of this thesis include the automatic selection method of non-interference points,the design of MEMS chip array test system,and the design of MEMS chip array calibration system.