Research On The Control Method Of MEMS Switch Driven By Inductive Coupling

The Internet of things technology is another revolution in the world information industry,micro sensors and actuators is one of the core technologies of the Internet of things.With the continuous development of the Internet of things technology,micro sensors and actuators are becoming more and more important.In the closed or harsh environment,the passive wireless sensor and actuator show great advantages because of its characteristics of wireless control,small size,and no need to replace the battery.However,the passive wireless sensors and actuators do not need to collect data at all times,so it is necessary to add the switch units to control the passive wireless sensor and actuator system.From the current research at home and abroad,the researchers are trying to control mechanical action of passive wireless sensors and actuators through a variety of ways,while the passive wireless MEMS switch control method is not been reported.In this work,an inductive driven passive wireless MEMS switch control approach is proposed,where the MEMS switch is used as the control unit.Passive wireless control unit and MEMS switch are designed respectively.The design and implementation methods of the inductive driven passive wireless MEMS switch control unit are established.The main contents and innovations include:First,the theoretical basis of inductive coupling system is introduced.Also,the factors that affect the efficiency of energy transfer are analyzed.Then,the research presents a passive wireless switch control system based on inductive coupling.The system consists of two parts:primary system and secondary system.Energy between primary and secondary systems transfers by inductive coupling.The secondary system is connected with the MEMS switch,and the signals with different frequency are transmitted through the primary system to control different MEMS switches.Then,MEMS switches suitable for the passive wireless system are designed and fabricated.Three kinds of MEMS switches are designed,which are fabricated by SOIMUMPs process.Finally,the design of the passive wireless MEMS switch array system and selective control of the switch array are realized.