Application Research Of Auto Disturbance Rejection Controller In Motion Control Of Rigid-flexible Coupling Platform

The linear mechanical guide motion platform used in micro / optoelectronic device manufacturing equipment needs high-speed,high-frequency,high-precision reciprocating point motion,which puts forward higher performance requirements on the control system.The rigid-flexible coupling platform compensates the frictional dead zone of the guide rail through the elastic deformation of the flexible hinge.Compared with the rigid platform,it can achieve a faster starting speed and higher positioning accuracy.However,the introduction of flexible hinges reduces the natural frequency of the platform,high-gain position closed-loop PID control can easily cause platform resonance,and the dynamic performance of the system is poor.Therefore,this paper studies an application method of auto disturbance rejection controller in the motion control of rigid-flexible coupling platform to improve the dynamic performance of the system.In this paper,the dynamic system model of the voice coil motor and the rigid-flexible coupling platform is first established,and the model parameter identification experiment is carried out using the frequency response method.Then,an auto disturbance rejection controller with a model is designed for the rigid-flexible coupling motion platform.The dynamic changes between the system model and the actual physical model and the external disturbance received by the controlled object are treated as the "total disturbance" of the controlled object.In this paper,the auto disturbance rejection controller is used to replace the position and speed dual closed-loop PID regulator,and the pole configuration method is used to adjust the bandwidth parameters of the auto disturbance rejection controller.Finally,the platform motion control and performance test experiments are carried out.The simulation results in this paper show that the dynamic performance of the auto disturbance rejection control system is better than that of the position PID control.In the platform motion control experiment,the same set of auto-interference rejection controller bandwidth parameters are used,and 1?2g acceleration commands are planned in the 50 mm travel point motion.The rigid-flexible coupling platform based on auto-interference rejection control can reach ± 0.1 ?m within 200 ms.State error,the position error of the platform in the fast trajectory tracking experiment is within ± 3 ?m.The experimental results show that the auto disturbance rejection controller can meet the performance requirements of the rigid-flexible platform motion control.