Research On Fractional Order Algorithm For Master-slave Macro-micro Positioning Stage

In this paper, the macro-micro dual-stage of the systems’ reticle stage is the object of the study. Because of the ultimate control performance of the lithography machine is almost depended on the control precision and performance of the macro-micro dual-stage, for this reason, the research on the control of the macro-micro dual-stage is really necessary. The research and analyses of this paper consist of the structure,strategy and control algorithm of the macro-micro dual-stage, there are also simulations on the items above, then the simulations are applied on the real experiment platform and obtain the fine results.First of all, the whole structure of reticle stage is introduced so that we can introduce and make modeling more conveniently, which consist of the mechanical structure layout, actuators and measuring sensors, then the control targets are given, which lays a foundation for simulations and experiments in the following.Secondly, the model of the actuators is established, and the necessities of applying the macro-micro dual-stage are concerned by analyzing documents and simulating, then the ultimate structure and strategy of the macro-micro dual-stage are determined.Afterwards, the concepts of fractional PID algorithm are stated, then the approximation method of the fractional operator is selected by comparison and analyses. Then the influence to the system of every parameter in fractional PID controller is explained by simulating.And then, these parameters are setted with Genetic Algorithm(GA), and the results of simulation meets the control targets.Last but not least, the experiment on the platform is carried out after introducing the software and hardware of the platform. The macro-micro dual-stage’s motion is under control, then I give some analyses about the results and the defects in the experiment.