Research Of On-line Curvature Monitor Software Applied To Film Growth Equipment

With the development of semiconductor technology,the huge market prospects of the semiconductor industry have also attracted more and more attention.In the entire semiconductor industry chain,the upstream semiconductor equipment still needs a large amount of imports to maintain production due to the late start of our country.In order to get rid of the current situation of being constrained by developed countries,we must have the ability to design semiconductor equipment independently.The online monitoring instrument in the film growth equipment is a very important part of the entire equipment,which directly affects the execution of the growth process and thus affects the quality of the semiconductor thin film produced.In this paper,an online curvature monitor was designed to monitor the curvature of the surface during the film epitaxy process,focusing on the implementation of the software part.Firstly,the overall system based on the multi-beam deflection method was designed for the online curvature monitor.The optical path composed of laser diode,etalon,and CCD camera was built,and the ARM development board equipped with Exynos 4412 processor was selected as the system processing platform.Secondly,based on the measurement principle,the image processing algorithm needed to process the laser spot was studied.The image obtained from the CCD camera was preprocessed by filter denoising,binarization and threshold segmentation.Then the three spot centering algorithms of gray centroid method,Hough transform method and circle fitting method were implemented,and gray centroid method was selected as the most suitable positioning algorithm through comparative experiments.For multiple spots in the image,the connected component labeling algorithm was studied to separate the spots to achieve the simultaneous positioning of multiple spots.Thirdly,the curvature monitoring software was designed and written.By using software libraries such as Qt,Open CV and using multithreading technology,the basic functions of the software were realized,and the design of the GUI was carried out.research on embedded transplantation,the software written on the PC cross-compiled to the embedded Development board and successfully run.Then the embedded transplantation was studied,the software written on the PC was cross-compiled into the embedded development board and ran successfully.Finally,the instrument calibration experiment was designed,and the rough calibration experiment and verification were carried out.The results showed that there is a certain error in the measurement of the radius of curvature,and the accuracy needs to be improved,but the repeatability is better and the basic measurement function can be achieved.