Design And Research Of Parallel Micro-motion Platform For Micromainpulation

With the rapid development of micro/nano technology,micro-manipulation technology has become an important research direction in the field of advanced manufacturing technology,in precision manufacturing,biomedical engineering,micro-electromechanical systems(MEMS),semiconductor processing,IC(integrated circuit)packaging It has important research value and broad application prospects in fields such as wire bonding.Aiming at the problems of small working space and low motion accuracy of the existing micro-motion platform,this paper takes the micromanipulation of biological cells in bioengineering as the engineering application background,and proposes a new type of large-travel and high-precision 3-PRC parallel Micro-motion platform,which carries out configuration design and optimization,kinematics analysis,dynamic characteristics analysis and experimental research on the platform.First,based on the 3-PRC parallel mechanism,the initial configuration of the platform is obtained by the rigid body replacement method.Based on the principle of mutual cancellation of parasitic motions,the initial configuration is optimized by combining the notched flexible hinge and the reed flexible hinge.A new type of approximately decoupled 3-PRC parallel micro-motion platform with large stroke and high accuracy is proposed.Secondly,based on the closed-loop vector method,the kinematics model of the platform is established,the forward and inverse kinematics solutions are obtained,and the reachable working space of the platform is drawn by the numerical search method.Through finite element simulation,the kinematics of the platform is verified under different loading conditions,which proves that the platform has good kinematic characteristics.Then,based on the Lagrangian method and the lumped mass method,the dynamic equation of the system is established,the first-order natural frequency of the parallel micro-motion platform is obtained by the mechanical undamped free vibration theory,and the finite element analysis software is used to simulate the constrained mode of the platform Through analysis,the first six-order vibration frequency of the platform is obtained to verify the correctness of the theoretical model and avoid resonance of the parallel micro-motion platform in the working state.Finally,the prototype is processed,an experimental platform is built,and the stroke of the platform,the coupling error and dynamic performance of the platform under different loading conditions are experimentally studied.The experiment proves that the platform has a good linear input-output relationship and approximate decoupling characteristics,and can achieve large stroke and micro-nano precision positioning meet the engineering requirements of micromanipulation.