Design And System Implementation Of Precision Z Axis Stage For Macro-Micro Composite Transmission

With the continuous development of electronic manufacturing equipment and precision testing instruments towards the high-speed and high-precision direction,the performance of large-stroke,high-speed and high-precision motion stage has become the key technical difficulty that restricts the development of such equipment and instruments.This paper focuses on the key issues of large-stroke high-precision motion stage;a new Z-Axis motion stage based on the macro-micro composite transmission is designed.The dynamic and static analysis of the designed stage are carried out,and the proposed error compensation method for the stage positioning process and the control models for the macro-micro motion stage are proposed.Then,the integrated system software for the macro-micro composite stage is developed,and the positioning performance of the stage is verified based on the established experimental stage.The main contents of the paper are described as follows:1.The technical background and the significance of the precision motion stage is investigated,and a in-depth investigation of its research status at overseas and domestic is carried out.At the same time,the key technologies and difficulties of the macro-micro composite Z-axis motion stage are analyzed,and the research content and plan of this paper are clarified.2.A new structure of a large-stroke macro-micro composite Z-axis motion stage is designed.The SolidWork software is used to establish the model and assemble the components,and its structure is analyzed to determine the model and materials of each component.3?Based on the designed Z-axis motion stage structure,built its dynamic model is built,and the dynamic simulation of the pretensioning spring of the micro-motion stage is carried out.Then,the displacement vibration shape change curve of the stage under the motion conditions can be obtained.Moreover,the motion discipline is analyzed,the preload and stiffness of the pre-tightening spring are determined,and the stiffness and stress state of the spring are verified by using the finite element method.4.The vibration of the macro-micro composite transmission Z-axis stage in the positioning process is analyzed,a positioning error compensation method is proposed.The PID control method of the macro-micro composite stage is studied,and the macro motion linear motor three-loop control model of the current,speed,and position loops are established.The micro motion closed-loop displacement control model of PZT is established,and the switching model of macro motion and micro motion is established.5.The system development of macro-micro composite transmission Z-axis motion stage is developed,and the performance index testing of the macro motion,the micro motion and the Z-axis positioning of the stage are carried out.The performance of the high-precision positioning of the stage are verified with high-speed,high-acceleration,large-stroke motion conditions.