| With the continuous improvement of requirements of the performance of microelectronics manufacturing and packaging equipment,the high-speed high-acceleration motion characteristics and the precision positioning performance of its key motion part,the motion stage,have become one of the key factors affecting the overall performance of the equipment.The contradiction between large-stroke high-speed and high-precision positioning is a key problem in the current research and development of the precision motion stage,and an in-depth study and the exploration of the effective solution for it have an important significance for the independent research and development and the industrialization development prospects of the advanced packaging equipment of our country.The inertial vibration of the high-speed high-acceleration motion stage in the positioning procedure is difficult to reduce in a short time,which seriously affects the rapid settlement and precision positioning of the stage,and thereby limits the operation efficiency improvement of the stage or even the entire machine.This paper aims at the rapid precision positioning problem of the high-speed high-acceleration large-stroke motion stage,the structure design,vibration reduction method and precision positioning method of the macro-micro motion stage are carried out.A high-speed large-stroke motion stage with macro-micro composite structure is designed.A rapid vibration energy reduction method based on the active vibration reduction of an external element is proposed.Meanwhile,a rapid macro-micro switching method and vibration reduction method based on a micromorion stage structure is proposed,and a bidirectional dynamic error compensation method after the stage vibration reduction is presented.With the experimental study,the effectiveness of the vibration reduction and the error compensation algorithm are verified,and the developed macro-micro composite stage can achieve rapid vibration reduction and nanometer level precision positioning under high-speed high-acceleration large-stroke motion.The main research contents of this paper are summarized as follows:1.For the high requirements of efficiency and accuracy of the high-end electronics manufacturing equipment,the research status of the high-speed high-acceleration motion stage at home and abroad is deeply carried out,and the research progresses of the vibration reduction methods and precision positioning methods for the motion stage are detailly investigated.The key challenges in this filed are identified,and the research ideas and main research contents of this paper are determined.2.By aiming at the target of high precision positioning of the high-speed high-acceleration large-stroke motion stage,a single-axis motion stage with a macro-micro composite structure is designed.A voice coil motion is adopted for the macromotion part,and a composite micromotion stage structure with a piezoelectric and a spring element is designed for the micromotion part.The dynamic modeling and simulation for the stage is carried out,and the structure performance and natural frequency of the stage is identified.The pgysical model of the stage is set up,and the micromotion stage spring stiffness is determined.The piezoelctric hysteresis error of the micromotion stage is also compensated,which lays a foundation for achieving high-precision positioning of the stage.3.By aiming at the problem of the difficult rapid settling of the inertial vibration in the deceleration and positioning procedure of the high-speed motion stage,a vibration reduction method for the target position is proposed.The vibration reduction principle of it is detailly described,and the action moment and the amount of the vibration reduction element are identified.With the simulation and experimental study,the vibration reduction effects and settling time with different motion conditions are obtained,and the effectiveness of the vibration reduction method for the vibration amplitude reduction and the stage rapid settling in the positioning process is verified.4.For the multi-position rapid precision operation and positioning requirement,a macro-micro rapid switching and micromotion stage vibration reduction method based on the self-structure of the stage is proposed,which dynamically start up the micromotion stage to perform the corresponding reverse operation based on the amplitude variation in the stage positioning for achieving a effective vibration reduction of the stage.The switching moment and the micromotion action amount in the vibration reduction implementation are determined,and the experimental analysis of the micromotion stage vibration reduction is carried out.The vibration reduction effects of the vibration reduction method and its effects on the rapid settling of the stage in the positioning process of the high-speed high-acceleration large-stroke stage are verified.5.The macro-micro motion stage still has some factors such as position error,inertial vibration and environmental interference after the vibration reduction operation,which seriously affects its precision positioning.For this question,this paper proposes a bidirectional dynamic compensation method for the positioning error based on the piezoelectric actuator of the micromotion stage,which performs the real-time bidirectional error compensation with the micromotion stage-actuation by through the real-time feedback of the target position error.Based on the analysis of the principle of the micromotion driving compensation,the calculation formula of the micromotion stage bidirectional dynamic compensation is given based on the positioning error value of the stage and the current extension of the piezoelectric,and the positioning error compensation experiments of the stage is carried out.The experimental results show that the compensation method can achieve a namometer level precision positioning for the stage.6.Based on the above related algorithm researches,the control system structure of the macro-micro motion stage is designed.The control algorithm,the switching and vibration reduction,the error compensation,and other algorithms of the macro-micro motion stage are programmatically implemented.The integrated software system of the entire macro-micro composite stage is established.The experiments for the motion performance and the positioning accuracy of the macro-micro motion stage system is carried out.The experimental results show that the designed stage can achieve a high-precision positioning under large-stroke(10-50 mm),high-speed(0.2-0.68 m/s),and high-acceleration(4-13.6 g)motion condition.For example,the stage can realize a 30 nm positioning accuracy with 40 mm stroke,0.2 m/s velocity and 8 g acceleration. |
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