A Micro Motion Platform System For Precision Phase Displacement

In order to measure the deformation of chip in the variable temperature,the measurement method of shadow moire fringe was be applied to achieve high precision topography measurement,precision phase displacement is the importment part of the measurement method of shadow moire fringe,therefore,it is necessary to design micro motion platform to realize precision phase displacement.This paper through the study of the method of phase displacement calculation,and through the accuracy of displacement influence the accuracy of calculation,then determined the displacement accuracy of micro platform should achieve±1μm, in order to meet the requirement of precision,this paper chose the suitable driving source of micro motion platform,designed rolling guide suitable for variable temperature,and designed the whole structure of micro motion plaform,in fully considering the factor of temperature,this paper designed the chip heater,in order to achieve the whole structure of micro motion platform of measurement method in variable temperature.And designed a temperature control system and micro motion platform system, to ensure the order and high efficiency of the whole measuring process.In addition this paper conducted the statics analysis of the motor anchorage of micro motion platform and structure thermal analysis of the carrying object stage through software,and finally came to the conclusion that the micro motion platform had been designed is meeting the requirement of the measurement accuracy.