| dividers are essential devices widely used to transfer energy from a higher frequency input to a lower frequency output in many RF applications. This thesis is focused on design of passive MEMS-based low-power frequency dividers based on the nonlinear response of coupled resonators. Our resonance devices make use of subharmonic resonance cascade, developing a chain of MEMS resonators to achieve a frequency division of 2N. Three types of device structures with different coupling methods have been designed, and the dynamics has been simulated using COMSOL Multiphysics. For the experimental realization and testing purpose, both electrostatic forces and motion via piezoelectric base have been considered for device actuation. Sensing techniques, tuning on the stiffness and fabrication process have been discussed briefly for the purpose of future study. |
