| Extensive microelectronics research has been conducted over the past decade to develop integrated replacements for high quality factor off-chip components. Micro-electromechanical systems (MEMS) based technology offers great promise as a result of improved reliability, microscale size, integration potential and eventually lower overall cost. In this work, the design, optimization, characterization, and test of a MEMS-based fully integrated frequency synthesizer serves to demonstrate a proof-of-concept for using MEMS clamped-clamped beam resonators in front-end RF systems. Details regarding system integration of the phase-locked loop, the MEMS resonator and the associated sustaining amplifier highlight issues related to managing circuit interfaces, system level performance and test methodology. Design and optimization of the different on-chip synthesizer components including the charge-pump, loop filter and voltage controlled oscillator, provides a thorough examination of the device evolution. System-level simulation and testing, facilitated by the design of high quality printed circuit boards, provides performance metrics that are benchmarked against conventional crystal-based systems. |
