Research On Detection And Control System Of Piezoelectric Micro Vibration Table

Piezoelectric micro-vibration table,a micro-displacement actuator designed and manufactured by MEMS(Micro-Electro-Mechanical Systems)technology,has the advantages of small size,low electromagnetic interference and fast response,and it can be used in the long-term drifting self-correction of IMU(Inertial Measurement unit).Besides,the piezoelectric micro-vibration table is discussed as the research object in this thesis: by designing the optical micro-displacement sensor,the motion state of the piezoelectric micro-vibration table is detected,and then the experimental platform is built.In addition,the vibration amplitude of the piezoelectric micro-vibration table is controlled by Labview software.And the main contents of this paper are as follows:1 By analyzing the similarities and differences between the traditional vibration table and the piezoelectric micro-vibration table,it is pointed out that the key to realize the stable vibration of controlling system of the piezoelectric micro-vibration table is the detection of the controlled variables(displacement and rotation angle).Then,in is and then the displacement detection at home and abroad will be investigated.Furthermore,the research and development of displacement detection and piezoelectric vibration table control methods at home and abroad are investigated,and the design requirements of micro-displacement sensors and the control requirements for piezoelectric micro-vibration tables will be proposed,too.2.The optical micro-displacement sensor is designed according to the characteristics of the piezoelectric micro-vibration table,and the relationship curve between the sensor output and the detection amount of different structures is obtained through simulation.In addition,based on the characteristics of the micro-vibration table and the simulation results of the micro-displacement sensor,the optimal layout of the internal components of the sensor is determined3.To characterize the dynamic performance of the shaking table system by using the second-order differential equation,to analyze the frequency characteristics of the piezoelectric micro-vibration table by the method of frequency domain analysis,to identify the parameters of the transfer function of the piezoelectric micro-vibration table,and to gain the second-order model of the piezoelectric micro-vibration table by combining the finite element simulation results.Based on research above,the PD pole control method is used to control simulation of the system,and the feasibility of controlling methods are verified by the simulation results.4.By Setting up the experimental platform of the optical sensor,and completing the verification test of the displacement and the angle of the sensor,and finally obtain the conclusion that the optical micro-sensor has a displacement detection resolution of 150 nm and an angle detection accuracy of 0.1°.The method of black silicon shading is proposed to eliminates the output oscillation phenomenon of the sensor during the experimental process.In addition,the method of adding reflective material in the sensor is proposed to detect the long-term drift of the sensor output.5.By Setting up the micro-vibration table control system,testing the motion state of the micro-vibration table through the Doppler vibrometer,and using the Labview software to process the Doppler output signal and control the power supply,and finally obtain the amplitude control of micro-vibration table through the PID control method.6.The optical micro-displacement sensor is proposed as a new structure to realize the six-degree-of-freedom detection,and the next research direction of the detection and control system designed for this thesis is introduced.