Micro-grippers Controller Design And Vibration Control

The micro grippers are widely used in the semiconductor equipment, robotics,bio-medical equipment. The micro-gripper commonly used piezoelectric micro gripper.It has the advantages of lightweight, large output force and ability of anti-electromagnetic interference. In this paper, a piezoelectric actuator and input shapingalgorithm for reducing the vibration of the piezoelectric micro grippers was proved.After testing it can be applied to the particular environment.Firstly, by analyzing the structure and principle of the piezoelectric micro-gripper,the overall design of the digital system of the driving power based on DSPTMS320F2812, as well as the principles of all subsystems are studied. The hardwarecircuit driver provides research foundation on vibration control of micro-gripper.Since driving the piezoelectric micro-gripper, there appeared a flexibleamplification mechanism vibration phenomenon during its opening and closing process,It would disturb the work of the piezoelectric micro gripper， In order to solve theproblem mentioned above, the basic concepts of input shaping vibration suppressionalgorithm was introduced and the advantages and disadvantages of the three inputshaping filters on vibration suppression of micro-grippers was analyzed, The inputshaping in the piezoelectric micro gripper vibration reduction control effect androbustness was discussed and validated. By embedding the input shaping algorithm, themicro-gripper vibration time25ms was reduced to0.5ms. The vibration of thepiezoelectric micro gripper can get a better suppression.Finally, piezoelectric actuator and control algorithms mentioned in this article canbe tested well and verify the feasibility of the program.