Piezoelectric Micro-Pressure Sensor

Novel type piezoelectric micro-pressure sensor which is composed of sensing element, inner preamplifier, isolation frame, fasket, cover board and shell has been developed. The piezoelectric unimorph is used as sensing element. The charge amplifier with high input impedance is used as preamplifier. It transforms the high output impedance of the unimorph to low and amplifies the sensing signal.The sensing element of piezoelectric micro-pressure sensor was analysised by the finite element method, it's model was established according to the dimension of sensing element in ANSYS to compute the vibration mode and extract resonance frequency of the sensing element. The analysis result was compared with the measure result obtained by the impedance analyzer, the conclusion showed good consistency about the first vibration mode resonance frequency of the...