Design And Application Of Low Range And High Sensitivity Pressure Sensor

At present,the micro pressure sensor has been widely used in aviation,aerospace,Marine,chemical,medical and other fields,providing precision testing and reliable data support for these field.However,the sensitivity of micropressure sensors is generally low.Therefore,how to improve the sensitivity of micropressure sensors is of great significanceTraditional MEMS design of silicon pressure sensor is usually in piezoresistive pressure sensor type,capacitance type or resonant type,as the graphene new materials appearing,since graphene materials exhibit excellent compression variable resistance characteristics,make it possible to apply in the field of pressure sensor.It is a new research direction to study how graphene materials can be used in pressure sensors and its characteristic analysis.This paper uses the mechanical properties of graphene materials to design and prepare graphene micro-pressure sensors.The main work is divided into the following four parts:?1?By the redox method of graphene films'preparation by has the characteristics of simple,low cost,so we use redox of graphene materials for pressure sensitive film,reducing agent using hydroiodic acid solution.By using this method,the graphene film prepared remains in good shape and the film is very smooth.?2?Conventional silicon micropressure sensors use corrosion fluids?such as TMAH?on the back of the silicon substrate for various types of anisotropic corrosion,and eventually form the back cavity structure.The design of the sensor is using the corrosion liquid to cut the cavity on the front of the substrate,to form the structure of silicon nitride supporting film.?3?The traditional silicon micro-pressure sensor usually has a single cavity structure.This sensor we designs a 10 x 10 cavity array structure.These improvements in the structure of conventional silicon micropressure sensors have improved the sensitivity of the sensors.?4?Finally,a series of tests were carried out on graphene micropressure sensor,including the performance test and sensitivity test of the sensor.According to the test results,the graphene micropressure sensor has good stability.At the same time,its sensitivity can reach the magnitude of 10^-5 mbar^-1,and the maximum sensitivity can reach to 2.4×10^-4mbar^-1.