The Study Of Biosensor Based On Interference Lithography

Interference Lithography is one of the important methods to prepare nanometer patterns.It does not need masks and can be applied to produce the large areas of graphics.It has advantages in low cost,simple operation,fast forming pattern.This advanced technique can be used to produce a large area of the periodic nanometer structure.The fringe pattern can be formed through the interference of two coherent beams.On the basis of the above,we can obtain several hundred nanometers of metallic gratings structure or the structure of the lattice and aperture arrays by the correlation process.Biosensor technique is a front technology in modern science at present.Sensing devices are prepared by using nanometer metallic gratings in Localized Surface Plasmon Resonance.It is applicable to clinical medicine,medicine development,life science and so on,and it will play a revolutionary role in the health care field.In this thesis,the metal grating,lattice and aperture array with different periods were prepared firstly by using the Interference Lithography.The system of Interference Lithography can be configured and optimized.By the analysis of the principle,the use of negative photoresist test,debugging the stability of the parameters.Prepared the periodic grating structures,it ranges from 130nm to 800nm.By interference exposure twice,prepared the structure of different sizes of the periodic lattice and aperture array.Using micro machining technology prepares the micro-fluidic chip.It combines with solid chip to prepare the biosensor.Micro biological analysis system is on the surface of solid chip.Constructing the miniature organism analysis system on the solid chip surface converts biochemical reaction signals to optical signals or electrical signals.The concentration of matter can be measured by converting and amplifying the signal,to complete the detection in accurate,fast and large amount of information about the biological components of cells,proteins,DNA,etc.In this thesis,the sensing mode of metallic nanostructures is analyzing and studying the characteristics.The biological sensors is prepared with small size,light weight,low cost,less sample and reagent,high precision,high accuracy,simple operation,etc.The 600nm periodic grating structure of the biosensor has the test sensitivity 649.986nm/RIU.The lowest concentration of AFP was 25ng/ml,had been successfully detected and won clinical application prospect.