Robust Design Of PZT Nanofiber Pressure Sensor

MEMS pressure sensor,as a very important part of MEMS sensor,is attracting attention widely.Dimensional deviation of MEMS pressure sensor is inevitable in the manufacturing process,due to the characteristics of MEMS pressure sensor including small size and mass-produced mostly compared with the traditional pressure sensor.The small variation of the MEMS pressure sensor,caused by the size effect,will have a certain impact on the stability of quality performance.Therefore,the robust design method will be applied in the design field of micro devices and studied to improve quality performance in this paper.Firstly,the lead zirconate titanate(PZT)nanofibers MEMS pressure sensor is the specific research object in this paper.The structure and working principle of PZT nanofibers MEMS pressure sensor are analyzed and the piezoelectric formula is derived.The design variables,noise factors,objective functions and constraints are determined.Then a robust design mathematical model based on random model and tolerance model is established.Secondly,the algorithm program is compiled to obtain the optimal design solution of the PZT nanofibers MEMS pressure sensor based on random model and tolerance model.The validity of the robust design results is verified by comparing the original scheme with the random model and the tolerance model.At last,the PZT nanofibers MEMS pressure sensor is simulated and analyzed by ANSYS to obtain the voltage distribution generated under the pressure.The results show that the simulation results are consistent with the theoretical values.It is proved that it is feasible and effective to apply the robust design method,based on random model and tolerance model,to MEMS pressure sensor.The structural parameters of PZT nanofibers MEMS pressure sensor are studied.The influence of various structural parameters of PZT nanofibers MEMS pressure sensor on its output voltage is obtained.The robust design and simulation analysis of PZT nanofibers MEMS pressure sensor show that it is effective and feasible to apply the robust design method to the structural design of MEMS pressure sensor for improving the stability of its quality performance.Therefore,it is of great significance to apply robust design method to the design of more MEMS devices to improve the stability of their quality performance.