Robust Optimal Design Of MEMS Pressure Sensor

With the continuous development of MEMS manufacturing technology,MEMS sensor technology is becoming more and more mature,among which MEMS pressure sensor is the most widely used type.Because there are many uncontrollable factors in the manufacturing process of MEMS pressure sensor,such as preparation environment,process error,equipment error,etc.,and because of the size effect,small variation will cause more significant influence,so it is extremely important to carry out robust optimization design for the whole MEMS pressure sensor.In this paper,the robust optimal design theory is applied to the design of capacitive MEMS pressure sensor,so that when the actual value and design value of controllable and uncontrollable factors change,the quality performance of the product can still be guaranteed and its performance stability can be improved.Firstly,through the analysis of the structure and working principle of capacitive MEMS pressure sensor,the main parameters affecting the sensor performance are obtained,the objective function and constraint conditions are clarified,and the mathematical model of optimal design is established.In this paper,penalty function method and Powell method are used to solve the mathematical model.Secondly,based on random model and tolerance model,the robust design method of capacitive MEMS pressure sensor is studied.On the basis of optimal design,the tolerance of design variables,noise factors and quality characteristics of the sensor are determined,and the robust design mathematical model of capacitive MEMS pressure sensor is established.The robust design solution is obtained by programming the model parameters into the algorithm.Compared with the optimal design solution and the original scheme,the results show that the robust design can not only improve the quality performance of the sensor,but also improve its robustness and reduce its processing cost,which verifies the correctness of the robust design method.Finally,the use of ANSYS simulation software of capacitive MEMS pressure sensor sensing diaphragm for force analysis,get the pressure under the action of bending deformation condition,the results show that the robust design theory is applied to the design of capacitive MEMS pressure sensor has certain feasibility and can effectively improve the stability of the capacitive MEMS pressure sensor to decrease the difficulty of the development of sensor for capacitive MEMS pressure sensor to provide necessary basis for further research and development base.