Research On BiFeO₃ Nanofiber Piezoelectric Pressure Sensor

The main contents of this paper is about MEMS micro pressure sensor, mainly in the ferroelectric material bismuth ferrite as a pressure-sensitive material, the use of its piezoelectric properties, nano-fiber and lithography prepared by electrostatic spinning method, splash silicon film shoot, dry-etching process for preparing micro combined design process and prepared BFO nanofibers piezoelectric pressure sensor for micro-processing technology and electrostatic spinning process to obtain a good experimental parameters and effects, and high-quality pressure sensor sampling. Finally, design and build a platform for testing and signal detection circuit herein piezoelectric pressure sensor to sensor preliminary experimental research and testing provides a theoretical and experimental basis for the multifunctional material in the micro-device, there is provided some reference.Based on parallel interdigital electrode structure, designed a ferroelectric material and a combination of MEMS piezoelectric pressure sensor, the main components are:a cavity with interdigital electrodes silicon substrate, a ferroelectric material nanofibers with the elastic force of the film. Introduces its working principle of piezoelectric material utilizing piezoelectric effect and the interdigital electrodes above nanofibers sensing structure, nanofibers can give full play to the piezoelectric properties of the piezoelectric material to determine viable respective size parameters, comprising:an elastic film side, the thickness of the interdigital electrode width, spacing, and so on.By conventional micromachining process analysis and re-improved preparation process herein MEMS pressure sensor, identify problems and solve and optimize a number of experimental parameters and methods to give the ICP dry etching process in the standard engraved Bosch etching etching process and the etching process of combining etching and related parameters, the etching speed, good effect, high repetition rate. Whether or elastic film electrode has a high surface quality on a silicon substrate micromachining obtained. Electrospinning nanofibers process, found a parallel nanofiber surface quality and optimal experimental parameters is to promote speed, electric field strength, and the reception from the plate spacing was 0.3 mL/h,19 kV,14 cm and 10 cm.Analysis of the morphology of the annealed finished the BFO nanofibers, XRD patterns and SEM characterization of nano-proof fiber parallelism better, uniform diameter, good surface quality, ferroelectricity. We designed and built a test platform for this article sensor, including:a sealed container, digital pressure gauge, air pump, hardware processing circuit, produced by the test platform article piezoelectric pressure sensors preliminary experimental research and testing to give the input pressure and output voltage relationship, the test found that the problems in the experiment.