Research On The Process Technology And Detection Method Of Two-Dimensional Drum Of Single Crystal Germanium

At present,optical detectors are widely used in various fields.With the rapid development of science and technology,their demand is gradually increasing.The two-dimensional drum of single crystal germanium is used as the core component in optical detector.Because of its irregularity and crystal specificity,it restricts the premise of universal use of optical detector.Therefore,efficient production of two-dimensional drums that meet the requirements of various technical indicators is a key issue in ultra-precision machining and detection.The single crystal germanium belongs to the brittle material and has the characteristics of high brittleness,brittleness,high hardness,low fracture toughness and anisotropy.It is difficult to ensure the surface precision and surface quality of each refractor surface of the drum by traditional processing methods.Using ultra-precision machining technology,the brittle-ductile transition is achieved controlling the cutting process parameters,so that the material is removed by plastic field cutting.It is of utmost importance to determine the best two-dimensional drum of single crystal germanium ultra-precision machining technology and to find a reasonable and effective detection method.In this chapter,based on the irregularities of the two dimensional drum of single crystal germanium and the anisotropic characteristics of crystal,the cutting conditions of the plastic field are determined by the brittle-ductile transition cutting thickness and the minimum cutting thickness;the critical cutting thickness of the brittle-ductile transition distribution pattern of the {100} crystal plane,{110} crystal plane and {111} crystal plane of the single crystal germanium is determined.The key influencing factors in the cutting process were established cutting force model of cutting edge for the single crystal germanium ultra-precision machining tool.The orthogonal cutting model for single-crystal germanium ultra-precision cutting was established.The influence of cutting parameters and tool parameters on the horizontal cutting force,radial cutting force and chip shape during the single crystal germanium cutting were analyzed.The critical cutting thickness of the brittle-ductile transition and the minimum cutting thickness of the relationship the tool cutting edge blunt radius.The influence of the {100} crystal plane,{110} crystal plane and {111} crystal plane on the cutting force during the cutting process was studied.Through the fly-cutting test of different cutting process parameters of {110} crystal plane,the influence law of different processing parameters on the quality of the machined surface was analyzed.The fly-cutting process parameters were further optimized to obtain the best set of fly-cutting process parameters for drums.Based on the two-dimensional drum angle detection method,a measurement system for the drum angle measurement platform was designed and built.This detection method can realize integrated measurement of the two-dimensional angle of the drum.Finally,the integrity system with process technology and detection method is formed.