Research Of Miniaturized Wireless Temperature And Humidity Sensor Node

With the development of modernization,temperature and humidity monitoring has become a very important part of the process of industrial and agricultural production,medical monitoring and food storage etc.It not only related to the normal growth of crops,smooth progress of modem industrial production,but also related to the health of human daily life.Therefore,modern real-time monitoring of temperature and humidity to each kind of environment,becomes more and more important.With the development of the MEMS technology and the appearance and development of three dimensional heterogeneous integration technology,temperature and humidity sensor which combined with TSV has great value of research.Because of the traditional cable monitoring of temperature and humidity is restricted by environment,maintenance difficulties,high power consumption and complex wiring,and many other shortcomings.On many occasions it is difficult to conform to the actual demand.So it requires a wireless solution that has free distribution,easy maintenance,low power consumption,wide range of monitoring,and real-time monitoring of temperature and humidity.And with the development of the Internet of things,the wireless products in the market more and more get the favor of people,and are gradually replacing cable products.And the wireless temperature and humidity sensor system which based on the ZigBee protocol can make up the deficiency of the traditional cable monitoring,because of its self-organizing,low power consumption,high reliability,etc.,and has become the first choice of the wireless temperature and humidity monitoring solution.This dissertation mainly discusses the TSV compatible integrated temperature and humidity sensor,and the wireless temperature and humidity sensor system,the main research and innovation of this dissertation are described as follows:(1)The basic theory of temperature and humidity sensor is analyzed,and the operating principle of resistive temperature sensor and capacitive humidity sensor is introduced.Then the mainly several kinds of wireless communication technology are introduced and their advantages and disadvantages are contrasted.In addition the basic theory of ZigBee technology in wireless communication technology is also introduced.Finally the architecture and corresponding function of the Z-Stack protocol stack are analyzed.(2)The structure design of integrated temperature and humidity sensor is analyzed,and the structure of the temperature and humidity sensor and the material of the humidity sensitive medium are determined.Then,the layout of TSV compatible integrated temperature and humidity sensor is designed,and according to the process of TSV technology,corresponding process of integrated temperature and humidity sensor technology is designed.Finally,sensitivity,hysteresis and repeatability of the sensor are tested by using the test system of temperature and humidity and temperature and humidity test chamber,and the test results are analyzed.Test results show that the temperature and humidity sensor has high sensitivity,the temperature sensor has good linearity and repeatability,but the linearity of humidity sensor gets worse with the humidity increasing,and deviation of hysteresis characteristics and repeatability of the humidity sensor leave much to be desired.(3)The general structure of the wireless temperature and humidity sensor system is analyzed and designed,and the main framework of the system,as well as the chip of wireless MCU,the chip of temperature and humidity sensor and the selection of power battery are determined.Then,hardware and software of the wireless temperature and humidity sensor system are designed respectively.The hardware design of the ZigBee wireless sensor module and the temperature and humidity sensor and power source module are completed.The software development and design of the coordinator and the terminal node are also completed.Finally,the performance of the wireless temperature and humidity sensor system is tested by using the temperature and humidity test chamber,and test results show that the wireless temperature and humidity sensor system can complete stated requirements,it can achieve the function of data acquisition of temperature and humidity and wireless transmission,and the measured value has high precision,the error of temperature is not more than ±0.5 ?,and the error of humidity is not more than±2%RH.This dissertation mainly solved the technology design and manufacture of the integrated temperature and humidity sensor that satisfy the requirement of three dimensional heterogeneous integration technology and is compatible with TSV technology.And the miniaturized wireless temperature and humidity sensor node was also studied and designed,the problem of the wireless monitoring and the miniaturization of sensor node system were mainly solved.