Design And Implementation Of Semiconductor Equipment Automation System Based On Android Platform

In the rapid development of the semiconductor industry at present,in order to achieve greater capacity,factories have paid more attention to the automation of production.This paper presents the software for the equipment of semiconductor automation production based on Android system(EAP Mobile)is aimed at the enhancement of the equipment production control and message management.It achieved the necessary function including lot,production,equipment and message management in production,which ensured that the production equipment can be stable and efficient controlled.From the analysis on the situation of automation software in semiconductor field and combined with the actual situation in the factory production field,this paper analyzes the functional requirement of various users,the inside and outside data exchange requirements of the system application.According to the demand modeling of the EAP Mobile system,it completes the design and implementation from the client to server.The EAP Mobile system uses Oracle database for production data storage and management,to ensure the safety and accuracy of records.Based on the Android platform development,the client is divided into five sub-modules including login module,lot,equipment,product level and message management according to the user operation type.The server part achieved three major functional modules using E3 platform.Including Strategy development that is used for server logic processing,the Process Type and Template file design and build which provides for system interaction with the equipment,Web Service configuration and DLL import to satisfy internal and external data interactive tasks.Strategy will use the E3 Designer tool to develop,corresponding to the five client sub-modules to design and develop the corresponding function for the Strategy modules,which handle the instructions issued by the Android client and response status information from device.Process Type triggers Strategy when the device sends information to the server.Each type of device type needs to define a Process Type to distinguish the process,which requires the use of the E3 system's Process Type Editor tool.Template is created using the E3 Integration Editor tool to set up E3 interactive information with the device.In order to improve the system compatibility of the equipment,it uses VS.NET C # to develop two types of device adapter including the shared file and TCP / IP.In order to fully explain the process of system function,this paper explains the function realization process between client,server and third party system from five main functions including login,lot,equipment,product level and message management.Finally,the system is tested and analyzed.The application of the new device type and the system performance in the real production environment are illustrated by an example,which verifies the practicability of the system.This article designed and implemented EAP Mobile system has more convenience,high compatibility and more comprehensive functionality that the previous semiconductor device automation system does not exist.Combining with popular mobile applications and traditional semiconductor device automation systems,which satisfies a number of actual requirements in the automated production of semiconductors.