Magnetic Properties And Hydrogen Evolution Performance Of NiFeP Micro Tube Array Based On Silicon Microchannel Plate

The silicon microchannel plate(Si-MCP)can be produced by bulk micromachining technology and surface micromachining technology based on p-type<100>silicon wafer.The Si-MCP is a kind of multi hole array structure.It has high depth-width ratio and specific surface area.The hole size is about 5 ?m,the spacing between holes is about 1?m.A structrue called NiFeP micro tube array(NiFeP-MTA)can be formed by depositing NiFeP alloy on the surface and inside of the silicon microchannel plate.During the deposition process,the traditional electroless plating process was improved and perfected,the improved method is called vacuum electroless plating,and the better effect was obtained,the alloy layer inside the Si-MCP is more uniform and flat.The magnetic properties of the NiFeP-MTA were measured and analyzed.In the direction of parallel to the long axis of the channel and perpendicular to the long axis of the channel,the coercive force are 12.4710e and 17.8140e,respectively,the rectangular ratio are 0.063 and 0.018,respectively.It turns out that the micro tube array is more likely to be magnetized in the direction of parallel to the long axis of the channel.The soft magnetic properties of the samples were also significantly changed after rapid thermal annealing at different temperatures.When the heat treatment temperature is lower than 300?,the higher the temperature is,the smaller the coercive force is,the smaller the squareness ratio is,the smaller the magnetic hysteresis loss and the better the soft magnetic properties;when the heat treatment temperature is more than 300?,the soft magnetic properties will decrease with the increase of temperature.300? is the best rapid thermal annealing temperature.The performance of NiFeP-MTA as a catalytic electrode for hydrogen evolution in alkaline electrolyte was studied.Firstly,the preparation process was optimized,the samples obtained by sputtering Al2O3 on one side of the Si-MCP after activation treatment has a better performance than the no sputtered sample.This may be because the sputtered coating can effectively restrain the deposition of the alloy.On the basis of this,doping phosphorus lead to significantly improvement of the hydrogen evolution performance of the sample,which was due to the increment of phosphorus content in the sample and the increment of the surface area of the sample.Placing a magnetic rotor in the electrolyte,the rotational speed of the magnetic rotor will change the current speed of the electrolyte.The experimental results show that the hydrogen evolution performance of the electrode can be improved after the rotor speed reaches a certain value.But there is almost no influence before the rotor speed reaches the value.