A Research On Precision Cleaning Of Ultra-high Vacuum Devices And Outgassing Analysis

The low-light-level image intensifier tubes has characteristics of high-performance, high-precision, high level of integration and miniaturization. So it is highly sensitive to the residual traces of contamination on the surface of the material. Begin from the initial raw materials, spare parts processing and manufacturing, to product parts assembly, as well as finished products before packaging, they all need precision cleaning processing. Compared with traditional industrial cleaning, the low-light-level image intensifier tubes has a stronger cleaning ability and higher cleaning efficiency. It adopts a more advanced cleaning technology, a better cleaning equipment and testing instruments, having a very clean processing environment, which guarantee the particularly high requirements of the development condition.This paper aims at the component materials and devices of the low-light-level image intensifier tubes, considering from two aspects:first, an experimental study about the cleaning processing of Kovar alloys, ceramics, solder, stainless steel, and microchannel plate (MCP). After comparing the experimental results, conclusion about the removal effects of the cleaning processing against the pollutants on the material surface can be drawn by analysing. During the experiment,It must be focused on cleaning to make the process low-carbon and green environmental protection. Second, study the superficial and internal gassing mechanism of Kovar and ceramic to establish the correlation model, combining gassing theory and diffusion theory to do data calculation and analysis.By analyzing the surface residue composition, studying the adsorption mechanism of pollutants, and exploring the detection method for the surface residual particle pollution, the cleanliness of material surface has been significantly increased after processing, which meet the high standards of electric vacuum devices for cleanliness. By analyzing, the ways to reduce the sources of pollution and the residue could be found. Thus it can decrease the outgassing amount of the metal parts in the tube, and effectively improve the performance and working life of the intensifier. For material such as alloy, stainless steel, in order to modify and protect the surface by chemical method and physical method, high precision optical microscope should be applied research lies in the deflated mechanism of the surface and inside of the material, the calculation and analysis about the data of the relevant model, deflated theory, diffusion theory. While the key point is how the state and smooth of material surface structure affect the reduction of outgassing amount.The research provides help to reduce tube material deflation and improve image tube performance index. The study also apply to the development and production of X-ray image intensifier tube and ultraviolet image intensifier tube.