Development Of FC3000 Wafer Transfer System

Since the ninety’s,China’s semiconductor manufacturing industry from technology import,improve to the independent research and independent design stage,and toward the direction of development.Due to the semiconductor equipment mostly controlled by foreign manufacturers,almost machines have already used over ten years,and life time will be discontinued.The machines are suffering damaged parts,stop production,and they cannot cover current advanced technology.Remanufacturing technology is an important part of old equipment to play a role.In this thesis,according to current transmission system of FC3000 wet bench,we will perform conversion and development for this system again.Firstly,we fixed conversion proposal base on current equipment,and perform matching calculation of electromechanical,provide a theoretical support for control system and servo system.Then start to analyze hardware and software,detailed figure out how to modify old control system,electrical design,equipment control system debugging of technology.The design of hardware transformation,FC3000 transmission system electrical control circuit,the input and output address setting,including debugging,system initial parameter settings etc..To get general method of remanufacturing machine transmission system,we hope it can be use to remanufacturing filed in near future.