Biosensor Based On SOI Microring Resonators Integrated With Microfluidic Channels

As the rapid social development, people's living standards improve greatly, disease surveillance, food safety, environmental protection and other fields have received great attention. To meet the increasing market demand, the development of sensor with low cost, high sensitivity, easily portable and real time is imminent. The integrated waveguide biosensor based on SOI with high sensitivity, ultra-compactness and manufacture compatibility with the standard complementary metal-oxide-semiconductor (CMOS) process, will play an important role in the future.The subject of this thesis is to integrate microring resonator sensors with microfluidic channels, and investigate their function with immune sensing and molecular imprinted polymers (MIPs).The thesis starts from the introduction of the microring resonator. The basic parameters of the structure and performance are introduced. Besides this, the coupling characteristics of resonator is analyzed by the transfer matrix method and the sensing principle of resonator is discussed. Furthermore, the structure performance, transmission performance and Vernier effect of double microring resonators are analyzed. The mode sensitivity of waveguide based on SOI is discussed.The thesis then introduces the fabrication process of the sensor, including microring resonators, microfluidic channels and the integration of microring resonators and microfluidic channels. Moreover, a precise optical coupling test platform is established and the systematic measuring process is introduced.After that, NaCl solutions with various concentrations are detected by the double microring resonators and the sensitivity of sensor is 1,804 nm/RIU. The influence of background refractive index is analyzed by detecting the different solution of protein. Moreover, the optical chip is modified by a layer of molecules using the using standard silicon surface functionalization procedure. The hIgG is successfully detected and the detection limit down to 7.1 ?g/mL. Specifically, the dynamic detection range is 7.1?125 ?g/mL.In the end, the thesis research MIPs based on single microring resonator. The single microring resonator is modified by MIPs in surface using testosterone as template. After the polymerization process, the chip is rinsed by an acetic acid-ethanol solution to remove the template. By detecting the different resolution of testosterone, the result indicted that the sensor is sensitive and the detection limit is down to 48.7 pg/mL. In addition, the reproducibility of sensor has been demonstrated.