Biosensor Based On SOI Microring Resonators

Since the reform and opening-up,China has been industrializing and urbanizing herself at an unprecedented speed.The achievements capture worldwide attention.However,the achievements are accompanied with a lot of problems:environmental issues,food safety and emerging diseases.Solving these problems require some fast-working,effective and low-cost biosensors.Silicon waveguide based biosensors on the SOI platform have broad application in these field,due to its good performance.We focus on the biosensors based on the ring resonator,of which the performance is studied and improved.The detection of bio-macromolecule is realized using the molecule imprinting polymer(MIP)method.Firstly,the paper introduced the material platform,working principle and performance of ring resonator.The Vernier effect based cascaded ring resonators are also analyzed.The fabrication process and equipment of ring resonators are introduced then.The integration and packaging of micro-fluidic channel and fiber array are accomplished next.The performances of ring resonator are optimized,including dynamic range and quality factor.The structure of three cascaded ring resonators is employed to broaden the dynamic range,which is 26 times higher than the single ring resonator.Wider waveguides are designed to improve the quality factor of the ring resonator.The highest quality factor reaches 6×10?5.Finally,the dynamic detection of testosterone molecule is achieved on a cascaded ring resonators sensor based on the MIP method.