The Design And Implementation Of Semiconductor Material Test Data Collection System

The SMARTF and FAB3 system has provided a complete automatic production management solution for the Semiconductor Supplier. In order to increase production automation, most semiconductor material suppliers use MES system which is according to the condition of production line to manage production in their workshop. Testing the semiconductor material lot is the key to control production during the production process. According to the actual semiconductor production line, this article uses MES system structure, focuses on researching and designing a general scheme of data collection systems to provide functions of real-time collection and the critical process parameter view of semiconductor material test data.This scheme based on MES system architecture and achieved process logic by FAB3 system. Using Web Service technology to establish the communication between different systems and using ADO.NET database accessing technology to operate database. According to the automatic test data collection needs of production-line, test data collection system is divided into data collection module, data analysis module and data queries display module. Data collection function in the system is on the Service side, which is to call Workflow to realize through FAB3 system. The collected data is stored in more than one associated data table, to provide real time data acquisition and storage capabilities for system. Data process and display are on the Client side, using the MVP design pattern to achieve the ability to crawl and process the data from the database, and presenting to the user in a friendly way. Finally, test the system and the results show that the system successfully achieves data collection and data query function. In the case of pressure test, faster response time and accurate implementation of all functions, this provides technical support to raise the level of production automation.