Research On Automated Material Control System In Semiconductor Industry

The Chinese semi-conductor industry is currently at highly developing stage. In China, groups of highly structured and well-instituted semiconductor corporations have emerge into the scene. The manufacturing process of a semiconductor product is an extremely complicated process. To succeed in manufacturing an end product, it is necessary for the object to under go hundreds or even thousands of steps. The object is often dispatched into various locations in the FAB due to the needs of manufacturing processes, thus a well-defined mechanism becomes a necessity in promoting the throughput of the end products. Due to the enormous quantity of wafers that needs to be processed and the largely wide spread of the FAB area, the pinpointing of the needed wafer at its exactly location becomes a somewhat tedious task. It is almost impossible to automate the flowing process of the object and the automating of moving such object is also a serous obstacle. For the reasons above, the building of a well-defined and fully functional material automatic controlling system is extremely important.The focus of this paper is centered on the planning and designing of a material automatic controlling system rooted on behavior patterns of the semiconductor manufacturing process. This system should enclosed all the data necessary for dispatching the moving of the wafer, and the data should categorized and stored based on the physical locations of the equipments, thus it makes easy for the FAB operators to locate the actual position of needed wafer for wafer pre-dispatch and then automate the moving process. Also it should be able to dispatch water in bulk quantity if an actually need arises. With such system built, the productivity of the manufacturing goods will be greatly increased. Most importantly, it raises the working efficiency of the FAB operation, which will in term provides better assurance for the semiconductor manufacturing industry in relation...