| In order to create more integrated chips, next-generation lithography technology requires a shorter wavelength extreme ultraviolet(EUV) light source, so laser-produced plasma(LPP) technology is considered the most likely choice. Obtaining high-qualified tin droplet target is an important part in the research and manufacture of laser-produced plasma EUV source. The vibration of the jetting makes it broken and become a continuous and uniform stream, so that tin droplet target is obtained. In this paper, the experiment aims to simulate the production, control and detection of tin droplet jetting by using water as target, test the practical feasibility of the entire jetting target generator and analysis system, so as to lay the foundation for jetting tin target in the future.A set of droplet jetting target generator and analysis system for LPP EUV is proposed, with the advantage of stable and reliable performance and agility for application, the jetting droplets can be a continuous and uniform stream. The system drives the CCD camera by calling the dynamic link library in LabVIEW to complete the image acquisition, real-time monitoring the movement of droplets, and then store the images. The droplet images will be analyzed by MATLAB, obtaining the droplet size, position, spacing and other parameters, which can be used for quantitatively evaluating the quality and stability of liquid droplet jetting. The experiment compares the effects of several types of nozzles jetting water droplets, and uses metal nozzle under different conditions of a repetition frequency of 30 kHz. The frequency of CCD camera to capture images of is 5 Hz. The analyses of images show the droplet size, spacing,horizontal position, and the changing trends of the parameters under different conditions can be found. The deviations of size and spacing are small, indicating the water droplet jetting is stable and uniform. But the deviations of horizontal position show there are some swing of the droplets. |
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