Analysis For Design And Develpment Of The Immersion Temperature Control System Of Immersion Scanner

Immersion scanner is the key equipment of manufacturing high performance integrated circuits, and the temperature stability of the immersion liquid is one of the key factors affecting the performance of the scanner. To achieve the temperature stability requirement of the immersion liquid, a temperature control system is built here, the performance of which is mainly determined by the structure and the control algorithm of the system. This thesis mainly focuses on the structure of the control system, and mainly deals with the following parts:A temperature-control solution which controls the temperature of the immersion water by using heat-exchanger with cooling water and achieves the temperature stability by adjusting the flow rate of the cooling water have been proposed in this thesis. Compared to the method of directly heating and cooling the immersion water, the solution adopted here makes the best use of the cooling water system of the plant, and can achieve higher temperature stability and anti-jamming capability.The preliminary solution adopts a loop which mixes the controlled water with the uncontrolled water so that part of the immersion can always been in a temperature-controlled state, increasing the infusion flow in the loop and improving anti-jamming capability. To avoid the impact on the temperature of the outlet, the flow servo valve is placed on the loop. The feasibility of the solution is verified by experiment, and the experimental data shows that the solution can get a better temperature stability.The temperature control system and the immersion processing system has been integrated in the prototype design. The temperature interference caused by pollution processing devices, degassing devices and pump has been analyzed, and its impact on the temperature control was effectively reduced by placing these devices in the front loop. The structure detailed design, manufacture and integration of the prototype was done in the thesis.The performance of the prototype was tested, and the results showed that the prototype had met the requirement of the project which is 22±0.01?@30 minutes. This laid a solid technical foundation for the development of immersion control system of immersion scanner.