Design And Analysis Of Immersion Liquid Temperature Control Experimental Device For Immersion Lithography

Immersion Lithography technology is the relatively advanced technology in the integratedcircuit manufacturing with key performance of resolution, overlay and productivity. And liquidtemperature, pressure and flow rate of the immersion system is one of the key factors affectingits performance. This thesis mainly focus on principal and structure of experimental device forimmersion liquid temperature control， providing hardware conditions for the immersion liquidsupply system.The thesis’s research object is the filled immersion liquid of the immersion lithography, andsummarized the functional and performance requirements of the immersion liquid temperaturecontrol experimental apparatus. The thesis designed an immersion temperature control device,which simulated the ultra-pure water immersion (UPW) that meets the requirements. In theimmersion liquid temperature control program, the thesis proposed the inner+outer feedbackcontrol loop. The inner, by adjusting the refrigerant flow to control liquid object temperature, isthe flow closed-loop feedback control. And the outer, by adopting the algorithm to determine theflow rate of the inner ring settings, is the temperature closed-loop feedback control. Based onPLC+PID control method，the thesis combined inner with outer loop circulation for the liquid tobe controlled, and the inner loop liquid used large flow uninterruptedly flow through the heatexchanger. At the same time, the outer loop liquid was sent to the immersion liquid supplysystem. The experiment device used two hot and cold temperature circulators to analogintegrated circuit plant of temperature, pressure and flow of the PCW and UPW. At last the thesisanalyzed and determined detailed design of the experimental device.The thesis took the key component of the device-heat exchanger as the research object,and with the FLUENT tools simulated the changes about exchanger shell-side liquid flow field.The velocity field, temperature and pressure field not only influenced each other, but there is acertain synergy. Lastly, each flow field changes with baffles were analyzed. At the same time, thethesis analyzed the correspondence between the shell-side of the heat exchanger’s heat transfercoefficient and the shell side pressure drop and inlet flow, which provided a theoretical supportfor the experimental test of the experimental device.