The Finite Element Analysis Of Graphite Boat Automatic Loading And Unloading Equipment

Graphite boat automatic loading and unloading equipment is a member of the photovoltaic automation equipment,the device can automatically load and unload the graphite boat of the tube PECVD in battery production process,and can automatically load and unload the basket for the printing line.Graphite boat automatic loading and unloading equipment uses high-precision six-axis robot when it take the silicon wafer into the basket in the loading process.this robot has advanced servo and coding system,using soft contact and soft landing technology to improve the control components and Mechanical coordination accuracy,thus ensuring the pinch when the precise positioning,reduce the fragmentation rate and pollution rate.The finite element method is used to study the performance of the graphite boat automatic loading and unloading equipment,and the topology optimization technology is used to optimize the equipment structure,which can effectively improve the static and dynamic performance of the equipment.In this paper,the three-dimensional model of equipment was established by using SolidWorks 2012,and the finite element model of the equipment was established by ANSYS Workbench 16.0.The main structure of the equipment and the color difference detection module were analyzed statistically to verify the strength of the main structure of the equipment and whether the vertical deformation displacement of the color difference detection module satisfies the requirement.The finite element analysis model is established for the six-axis robot and the gripping component,and the boundary condition is applied to analyze whether there is a possibility of resonance between the external frequency of the equipment and other external excitation frequencies.The analysis provides important modal parameters for the study of its vibration,noise,fatigue life and other issues.In this paper,the key components of the graphite boat automatic loading and unloading equipment such as the Color difference detection module and grab component were subjected to weight reduction on the basis of ensuring its carrying capacity to optimize the structural performance as the goal.According to the optimization results,the three-dimensional model is improved and the optimized structure is analyzed again.The optimization effect is evaluated and finally formed the theory and methods of topological optimization of the structure of graphite boat automatic loading and unloading equipment based on ANSYS Workbench 16.0.By comparing the performance of the equipment before and after the optimization,we can see that the main performance parameters of the optimized equipment structure have different degrees of improvement,and the expected optimization effect has been achieved,which provides the basis for the follow-up study.