Design Of Polishing Device For Inner Wall Of Polysilicon Reduction Furnace

The world of traditional energy supply is insufficient, the traditional energy consumption increased, its irrefragable aggravating the negative impact on the environment, looking for new energy has become an important issue in the field of energy. Solar photo-voltaic industry has great social and economic benefits,in view of the photo-voltaic industry the main raw material of polysilicon, production technology on saving energy and reducing consumption, has become a focus of research. Reduction technology is the poly-silicon production process, which is one of the most energy consumption and produce by-products process. Reduction furnace that the important energy consumption equipment in the reduction process.Reduction furnace gases are within the long-term high temperature reaction, corrosive gas, causing black surface. Temperature distribution in the furnace, the furnace wall surface to generate the contaminant such as amorphous silicon, silicon powder, affect the reduction furnace wall roughness, lower reflectivity, adding silicon rod radiation energy. Through the scheme, designing a set of polycrystalline silicon reduction furnace wall surface to finish polishing device, effectively maintain the furnace wall, keep the furnace wall high reflectivity, maintain growth of silicon rods need to heat.This study to uniform stability inner surface contaminant removal reduction furnace as the goal, to mirror the reduction furnace surface. The scheme design, modeling, numerical simulation, the simulation calculation, the method of the combination of reduction furnace wall structure and function of the polishing machine for the design of the related parameters, the concrete research content is as follows:(1)Main pollutants adhesion characteristics analysis. The theoretical analysis of the characteristics of the main pollutants are attached, the use of computational fluid dynamics method for reducing furnace temperature field numerical simulation of internal flow field, summarizes the reduction furnace internal heat transfer characteristics and the rule of the flow field, draw the conclusion: effectively improve the lining material emissivity, reduce energy losses. How to design a polishing head movements, smooth and uniform removal of surface material, to provide theoretical reference.(2)Polishing device 3 d modeling and structure design of key components. Determine the size of the related spare parts and materials, and the key components in finite element analysis for the polishing device,analysis of mechanical characteristics, strength check. Determining the resonance occurs, deformation of large frequency range, for the structure improvement, anti-vibration design to provide theoretical guidance.(3)The contact analysis and motion simulation polishing process. Theoretical derivation polishing action occurs, tangent contact polishing arc dynamic length, material removal model, put forward the main factors influencing the polishing quality. And put forward speed matching relation between main components, so as to ensure the stability of polishing device.(4)Polishing device movement simulation. Using Matlab software programming, the polishing head centroid trajectory simulation, through the Adams software to emulate the polishing head of center of mass,it is concluded that the acceleration and displacement curve and theoretical guidance for the late parameters optimization.