The Resrearch And Disgin On The 60 Pairs Of Rod Polysilicon Reduction Electrical System

Silicon is the basic material in rhe fields of modern electronic,electrical,information and new energy power(Photovoltaic Power),The polysilicon production is the most critical part in the silicon material industry chain,and also one of the main bottlenecks which restricts the development of China's silicon industry.Polysilicon reduction furnace power supply system is the core of the polysilicon reduction and growth control system,Mainly used to control the voltage and current of the silicon rod in the polysilicon reduction furnace,thus controlling the furnace temperature,providing the best environment for the growth of polysilicon.Polycrystalline silicon rods in the growth process,the resistance is gradually reduced by the high resistance,Therefore,the output voltage of polysilicon power supply is gradually reduced,the output current increases,the voltage range from a few thousand volts to a few hundred volts,the current range of a few hundred to a few thousand security,the specific value relating to the growth of silicon rod thickness and process.In order to save resources and improve efficiency,with the continuous development of production process and technology,the single furnace production is increasing.Based on this,this paper mainly study the 60 reduction power supply system.The main contents of this paper are as follows:(1)The hardware design of 60 pairs of rod polysilicon reduction electrical system,(2)Analysis of the stack control principle of the electric heating power supply,and the method improves the power factor of AC voltage regulating circuit and suppresses the harmonic.(3)Series protection measures of reducing heating power supply;(4)Simulation and control of stack control system;(5)the switching control from the parallel to he series of the load during the reduction heating processThe polysilicon reduction heating system for the 60 pairs of rod,designed in this paper,work well.It has been tested in the factory and used on site,it prove that the performance can meet the production needs of polycrystalline silicon reduction furnace.