Research And Design Of The Impactor Polysilicon Broken Mechanism

As a basic material used in semiconductor material,Polysilicon is called "microelectronics building cornerstone",which is widely used in microelectronics technology and photovoltaic technology.Polysilicon crushing has been cracked operating by using the breaking hammer with the mosaic cemented carbide and tungsten carbide alloy.And even if in some countries of the more advanced polysilicon technology have consistently used this breaking way.Though the flexibility of the artificial broken is good,the efficiency of the crushing is low.And the dust is bad for the workers' health in the process of the crushing.With the greatly promotion of the scale and concentration degree of the the domestic polysilicon enterprises,artificial fragmentation has been difficult to meet the production requirements.Therefore,automated crushing is the inevitable trend of the development of the polysilicon broken.Based on the damage and crack growth of polysilicon under the impact action,the pelton polysilicon crushing device was studied and designed in this paper.The three-dimensional model of the crushing device was established by using three-dimensional modeling software(Pro / E).Then the statics analysis of the main parts of the crushing device was done,And the PLC control of the crushing device was controlled.1.Combining with the constitutive model of damage of the brittle material,the impact damage of the polysilicon rod was simulated on the influence of the plane and round head hammer by using AUTODYN software,and the distribution of the crack growth was observed.Under the impact of the flat hammer,the crack propagation is faster and the expansion areas are wider,and the crack propagation of the round head hammer is slower.After analysis,the flat hammer is more suitable for the crushing of polycrystalline silicon,the role of the dot is more suitable for auxiliary crushing.According to this part of the damage simulation analysis,the theoretical basis is provided for the pelton polysilicon crushing device.2.According to the design requirements of the pelton polysilicon crushing device,we put forward the general design scheme of the pelton polysilicon crushing device based on the polysilicon damage and the crack growth under the impact action.Then we select the type of the roating part and design the key parts.Finally the whole three-dimensional modeling of the device was designed by Pro/E software.3.The ANSYS(finite element analysis software)was used to simulate the key components of the device and analysis the reliability of the key parts in the process of operation.4.According to the requirements of the breaking steps,the ladder diagram instruction was compiled to realize the automatic control of the broken devices by using the PLC(programmable logic controller)and the GX-Developer software.The instructions were correctly compiled by the simulation of the software.