Research Of The Control System Of The Silicon Furnace

Polysilicon is the most basal and original material in information industry. Along with the rapid extend of silicon market, serious short of silicon arise. LuoYang Chinese Silicon High-tech Ltd. experimented successfully the polysilicon deoxidation furnace with 12 set of poles in January 19,2004. The furnace is large size, high effect and energy saving and is the first equipment of this kind in our country. Silicon core carrier is needed by the equipment to produce polysilicon. Then large-scale silicon core production becomes urgent problem before us.After the working principles of silicon core furnace are presented, the control system of silicon core furnace is mainly discussed. By analyzing various control requests, the item designs slow velocity system, rapid velocity system and control system of seed crystal tray. The design methods and working principles of each system are discussed detailedly. In consideration of yield and material consume, a rotary machine of seed crystal tray is added to the silicon core furnace in order to produce continuously six crystal sticks with diameters of 7 to 8 millimeters, that is the innovation of the item.By repeating Optimization design, the equipments come to an ideal work state, satisfying the demand of the crystal growth.The silicon core furnace can increase production efficiency and decrease energy waste greatly. The furnace can also establish basis of breaking blockage of foreign countries to our country in polysilicon technique thoroughly and changing the situation of long import depending in silicon industry of our country. At the same time, the item fills up the research blank of this kind of equipment in our country, establishing sound technique basis for the further development of micro-electronics technique in information science and electric and electron technique in energy and automatization science.