Design And Implementation Of The Centralized Monitoring And Management System Of Diffusion Furnace Based On The CAN Bus

In recent years, the semiconductor industry is developing fast in China. The semiconductor manufacturing process is complicated and full of the high professional requirements. In wafer manufacturing process, every stage’s status of the diffusion furnace directly affects the yield of wafer manufacturing. Monitoring and management system of diffusion furnace equipment is very important for ensuring the safe operation of the equipment and increasing the productivity of the wafer process. Aimed at the problems, such as the insufficient of vertical diffusion furnace’s recipe storage space, the technological process by artificial requiring manual supervision, key parameters for the equipment need be entered manually and extraction, this article researched communication protocol SECS and proposed the solutions of diffusion furnace centralized monitoring and management system from the communication system reliability and scalability of the technology needs. This article mainly solved the communication data congestion and operation conflict during the multi-point communication and mutual communication. The main research content of this article is as follows:Firstly, based on the analysis of the development situation of the diffusion furnace centralized monitoring management system and the monitoring requirements, this paper designed three kinds of topology structure of this system. At the same time, this paper analyzed and compared them in terms of node connections, communications and other technical parameters. The system overall design scheme based on CAN bus was determined in the end.Secondly, the communication repeater was designed and developed for the problems of the communication data density of the diffusion furnace and high real-time demand of communication. In this paper, the communication repeater was designed and developed, which was used for real-time data processing. The repeater could achieve data processing and storage and SECS/CAN protocol conversion functions. The communication protocol included SECS/CAN protocol conversion and the application layer protocol of the CAN bus. The designs of the hardware included the schematic designs and PCB board designs of STM32 main control unit, serial interface, CAN interface unit and other unit. In the side of software design, the STM32 control procedures developed based on the C language. And then the repeaters communicated with the host computer and the diffusion furnace respectively.Once again, according to user requirements, PC monitor management system software was designed and developed based on the C# language and SQL Server database in this paper, including the management system software and acquisition system software. Server monitored and controlled the diffusion furnace in each production workshop intensively through CAN bus.Finally, through the overall debugging, the congestion of the large amount of realtime data were solved, the system anti-jamming were improved. This system had been installed in the factory and run well. One side, this system can realize monitoring and management functions for the diffusion furnace, improve the efficiency of wafer production. On the other side, by using real-time, data abnormal data can be found in a timely manner, the rate of the wafer defective were reduced. At the same time, the production process was improved.