The Research & Development Of The Diffusion/Oxidation System Based On Microcomputer Measurement & Control Network

Diffusion/oxidation furnace is a kind of very important equipment which is used in semiconductor process production line. It is applied in the manufacture process of the discrete semiconductor devices and integrated circuit which have diffusion, oxidation, annealing and alloying processing. It is also used in special temperature treatment of other material and is an auto-equipment which has the command of long time working, high precision and high stability. Therefore it has great significance to develop diffusion/oxidation equipment with high performance in order to promote the development of the semiconductor manufacture industry in our country.Firstly, this paper discusses the development and problem of semiconductor manufacturing industry in China; with the consideration of Integrating Control and Management, the author points out that we have to import Ethernet technology to let the equipment run together in a network and realize centralized monitoring and data management of the semiconductor equipment in order to break the isolated island automation. The general design and hardware selection have been done to develop a kind of diffusion/oxidation equipment which is used in solar cell production line. Because of the high command of the temperature precision in furnace, the author has studied several PID control algorithms and PID parameters turning methods. Three-segment-heating method and PID controller have been used to control the furnace temperature and gets good effect. Visual Basic has been used as a tool to develop system software and data acquisition ,output control have been done by using DLL which is in device driver of the data acquisition card. Digital filter technology has been used for anti-disturbance. The equipment has the function of recipe auto-running and alarm handling by using reasonable software design method and it has concision GUI which is easy to use. At last, the author has put forward a method which can make equipments run together in a network. The monitoring PC has been connected to several equipments by a switch hub and it makes use of Winsock control to realize the communication to the slave-computers, so it can get the real-time data and recipe curve of the slave-computers which are in running state and it make the upper class in enterprise get production information in time by using Access to accomplish data querying and management.Diffusion/oxidation system has been delivered to the client and they are in a...