Design And Implementation Of Automatic Batch Acceleration Sensor Calibration System

With the development of MEMS technology, MEMS acceleration sensor has been developed rapidly, MEMS acceleration sensor has been widely used in many fields. The market demands for MEMS acceleration sensor sustainable grow. But MEMS acceleration sensor requires various parameters test before putting it into use in the market for the batch production. But the MEMS acceleration sensor mainly tests by artificial and one-piece calibration which spends much manpower in China. There is no automatic batch of testing equipment to complete the static rolling test and dynamic calibration test. This paper designs a set of automatic batch of MEMS acceleration sensor calibration system. This system can do the Static and dynamic calibration test for multiple parameters of the MEMS Acceleration sensor with the calibration in different temperature and humidity environment.Based on the analysis of MEMS acceleration sensor calibration method and theory, and the requirements for the system design and technical indicators, this paper designs the overall structure of the calibration system. The system mainly standards six parts by batch acceleration sensor in test platform, automatic locking mechanism, multi-channel data acquisition module, the system control module, computer software, and a variable environment device. The automatic locking mechanism is mainly responsible for the automatic conversion of the static rolling device and the dynamic calibration device, to realize the locking and releasing of the acceleration sensor carrier and the shaking table top table, so as to realize the static and dynamic calibration test.The paper researches and designs the system control module and data acquisition module in more detail. The control module chooses DSP as the core controller, and designs each of the hardware circuit in the control module; the data acquisition module chooses FPGA as the core controller which is designed each of the hardware circuit,to realize the data acquisition and processing of 20 sensors. The paper designs hardware language for system control module and data acquisition module, and analyze of each function module in detail.Finally, install and test automatic batch acceleration sensor calibration system. Firstly, debug and analyze each part of the system, and then do the overall alignment test, solve and improve the problems during the testing process. According to the work flow of the calibration test platform, the static rolling test and dynamic calibration test of the acceleration sensor are carried out. The system can automatically realize the conversion of static and dynamic test, the whole test process can be automatic and smooth operation, and can be used to calibrate the 20 acceleration sensors at the same time, to improve the efficiency of the test.