Design And Theoretical Research Of There-axis Strain Gauge Acceleration Sensor

Three-axis acceleration sensor is applied more and more increasingly in engineering. So the research about three-axis acceleration sensor is useful. At present, three-axis acceleration sensor based on piezoresistive, piezoelectric and capacitive is made by MENS and monolithic yielding part structure is used. There are many existed issues on multi-dimensional monolithic acceleration sensor. On the background of Anhui province nature science fund program, "Development of strain gauge three-axis acceleration sensor", a new type of three-axis full shearing acceleration sensor had been developed based on analysis to present three-axis acceleration sensor in its structure and working principles. The strain gauge full shearing measurement, monolithic yielding part structure and single mass are adopted in this sensor. It is made by mechanical manufacturing with less cost. It is a new type three-axis acceleration sensor and is an innovation at sensor design. Main research work and creative points of the paper are shown as follows:Yielding part is key component of sensor, static and dynamic characteristics are influenced by its main structure parameters. The influence of the main structure parameters on static and dynamic performance was studied by orthogonal experiment design and extreme analysis method, yielding part was optimized.Structure design of sensor and method of machining were introduced. Static performance of three-axis acceleration sensor was analyzed by finite element , which assured strain distribution regulation of yielding part loaded in different direction , and proved that sensor has good line characteristic. Based on this, bridge scheme and deployment of strain gauge were assured, how to realize decoupling output was analysis in theory.Modal analysis , harmonic response analysis and transient analysis of sensor were finished in this paper. Through modal analysis former six natural frequencies and mode shapes were obtained, through harmonic response analysis and transient analysis amplitude frequency characteristic of sensor was obtained, and dimension coupling was known.Static calibration of sensor was done by gravity acceleration method. Sensitivity, nonlinearity and hysterisis error , that static characteristics of three direction of sensor were abstained by static calibration. New type horizontal vibration table and computer automatic calibration system were designed, which realized dynamic calibration of frequency response characteristic of sensor, frequency response curves of three directions and frequency application range of sensor were assured .The coupling problem is an important factor limiting measuring accuracy of acceleration sensor, in order to overcome the limitation of traditional linear decoupling, a nonlinear static decoupling method was studied based on BP neural network, by which decoupling analysis of three-axis strain gauge acceleration sensor was finished. Compared with least square method, the result indicates that the method greatly improved the decoupling accuracy.