Automatic Batch Of MEMS Acceleration Sensor Design Research And Testing Equipment

An important part of a MEMS accelerometer MEMS inertial devices, has beenwidely used in automotive electronics, marine, office equipment, medical and other fields.In recent years with the development of smart phones, biomedical, machine monitoringand other industries, the market demand for MEMS acceleration sensor in every year. Butbefore going into the market, the need for MEMS acceleration sensor calibration test ofthe performance indicators. At present, there is not yet able to achieve automatic batchMEMS accelerometer calibration of test equipment. This design study of an automatedbatch testing MEMS acceleration sensor device which can be implemented in accordancewith the variable environment for MEMS acceleration sensor calibration and test variousperformance indicators.Firstly, by analyzing the MEMS acceleration sensor calibration and test severalmethods and principles, designed the overall organization of the test device. The testdevice consists of a static test part of the dynamic test section, PLC control system andPC software. Article use SolidWorks for3D mechanical design software for themechanical structure of the test apparatus will be a detailed design study. Mechanicaldesign test apparatus includes an acceleration sensor carrier, roll drive mechanism, ahorizontal drive mechanism, the drive mechanism and the vertical-lifting designautomatic locking mechanism.Secondly, the paper designed to test the software and hardware devices were studiedin detail. The hardware design of the test device including PLC controlled stepper motorservo circuit, photoelectric switch circuits, PLC and the computer’s serialcommunications, high-precision angle sensor line monitoring circuit design; softwaredesigned to test the device includes PLC control the main program, FX2N-20GM positioning procedures, high-precision angle sensor line monitoring software design.Finally, automatic batch MEMS acceleration sensor test device mechanical assemblyand system debugging. Analysis of the assembly process problems, propose specificsolutions. MEMS accelerometers were static and dynamic calibration test test, calibrationand test results are analyzed, the test results show the effectiveness and feasibility of thetest device.