Design Of Performance Testing System For Multi Iron Nano MEMS Pressure Sensor

The Multiferroic nanofibers MEMS pressure sensor is a kind of pressure micro sensor based on the piezoelectric properties of multiferroic nanofibers.With the development of information technology and the progress of science,the requirement for the quality of the new type of sensor is improved.The research of multi iron nano MEMS pressure sensor is still in the initial stage,and there are few devices on the market to test and measure the nano iron MEMS pressure sensor.Therefore,this paper proposes a performance test system of iron nano MEMS pressure sensor based on building a test platform for the sensor prototype produced by laboratory,to test the sensor output voltage on the environment of temperature,pressure and the magnetic field,then according to the analysis of the sensor output signal,for further evaluation of the feasibility and test scheme of testing device.The experimental results are helpful to the improvement and optimization of the test system for the MEMS sensor.In this paper,the sensor performance test system is designed,which includes the mechanical device,the control system hardware part and the host computer software part.(1)The mechanical device is divided into two parts:the upper part and the lower part;the lower part is a pressure vessel,which provides the pressure difference needed for testing the sample to be tested,and the pressure range is 0-20KPa.The upper part is the main body of the test device,which is used for fixing the sensor to be tested and providing the environment needed for testing,such as testing the required temperature,magnetic field strength,etc.The material of mechanical device is aluminum alloy,which is easy to be processed and processed at the same time to ensure the strength and rigidity.(2)In the hardware part,the STM32 microprocessor is used as the core,and the following modules are designed in detail,such as signal amplification circuit,A/D conversion circuit,temperature sensor circuit,communication interface circuit and so on;The software part mainly aims at the main program and the host computer interface design of the test system.Based on the requirements of the software environment friendly,real-time reflection and recording the sampling data,the C++and Lab VIEW software are used to design the display and control interface of the host computer.(3)The experimental platform is built,and using the device to test the multi iron nano MEMS pressure sensor,then analyzing test results.The test results show that this system can realize the detection of iron nano MEMS pressure sensor output signal voltage,and can change the test environment for the test such as temperature,pressure and magnetic field intensity.The testing device is simple,effective and easy to operate.It proves the rationality and correctness of the test equipment,and provides the theoretical and experimental basis for the future improvement.