The Research On Motion Control And Wafer Auto Align For Prober

Prober is a kind of wafer probe test equipment. Probe testing plays an important role in the semiconductor device manufacturing process,since probe testing can distinguish normal and abnormal dies and reduce the costs for subsequent working procedure. Nowadays, the diameter of wafer is increasing(reaches 300 mm) while the sizes of dies is decreasing,which puts forward higher requests to automation degree of prober, manual or semi-automatic prober needs more artificial participation, thus developing automatic prober is an important means of improving the efficiency of wafer probe testing. Because the research of automatic prober started rather later in china, there is a big gap compared with advanced world levels.This topic researches the key technologies of motion control,wafer auto position and alignment according to the requirements of automatic prober.Most prober systems are controled by a PC and a motion control card. Based on the movement characteristics of the prober, this paper puts forward the required function of motion control card. To meet these requements, this paper chooses a FPGA device, designs all motion control algorithm, develops PC driver program and API functions and designs a four axis motion control card based on PCI bus.Machine vision is an important means to realize automatic probe tes ting in prober. According to the requirement of the wafer testing, this paper researchs related algorithm to get auto wafer positioning and alignment, including using edge detection algorithm to get the edge and center position of wafer, using image template matching algorithm to get the position of dies and caculate the inclination angle of wafer.