Design And Analysis Of Wafer Transfer Robot

Since1940s, Shottle and R Ohletcreated the first transistorat Bell Labs. Forhalf a century, the semiconductor industry is booming, expected by2030, it willbecome the largest industry in the world. Wafer transfer robot is the keyequipment for wafer handling and positioning in the chain of semiconductorprocess. It affect the processing qua lity and production effic iency directly.However, in the developme nt of advanced automation equip ment, the market isma inly dependent on foreign import. so the research on wafer transfer robot hasan important significance on our semiconductor industry.The aim of this study is to develop a kind of wafer transfer robot which canachieve high stability, high speed, high precision. In contrast to the machinery,control scheme of the domestic and foreign various types of wafer trans fer system,ultimate ly we choose R-type manipulator as mechanical system,and embeddedmotio n controller as control system.To achie ve high precis ion motion control, I establis h kinematic modelaccording to the kinematics theory and mechanical structure and analyze theimpact of each joint motion errors on the end actuatorposition. To get accurateposition of the wa fer center coordinates, the pre alignment system obtain thewafer contour informatio n through linear array image sensor, and then using themethod of least squares fitting circle and locate the center positio n. At the sametime, propose the cutting edge location a lgorithm, according to the three pointcircle princip le, monitor wafers profile radius of three adjacent points fittingcircle change, realize the positioning of the cutting edge.According to requireme nt of the above sche me of the control system, wedesign a embedded system as master controller, which use ARM+CPLD as themaster chip. We comp leted schematics design, PCB design, hardware debug. Atthe end of project. we make a online verification on every function of the robot tomake sure that it can be mass production.